Influence of quantized diffractive phase element on the axial uniformity of pseudo-nondiffracting beams

Jyh Rou Sze, An Chi Wei, Wen Hong Wu, Chun Li Chang

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

The analysis of the diffractive phase elements (DPEs) that synthesizes pseudo-nondiffracting beams (PNDBs) in different axial regions are described. Those elements are designed by using conjugate-gradient method algorithm. To meet the requirement of lithography fabrication process, the obtained optimum continuous surface profile of DPEs must be quantized in the multilevel structure. In order to analyze the impact of different quantization levels, the axial-illuminance RMS variance of PNDBs for each quantized DPE is calculated and compared with each other. The compared results show that the axial illuminance of the PNDB of DPE with smaller-levels quantization fluctuates more rapidly than that of DPE with larger-levels quantization. Meanwhile, the analyses also show that the axial uniformity of the PNDB of DPE with a longer focal length is less sensitive to the quantization level.

原文???core.languages.en_GB???
主出版物標題International Conference on Optical and Photonic Engineering, icOPEN 2015
編輯Yu Fu, Anand K. Asundi
發行者SPIE
ISBN(電子)9781628416848
DOIs
出版狀態已出版 - 2015
事件3rd International Conference on Optical and Photonic Engineering, icOPEN 2015 - Singapore, Singapore
持續時間: 14 4月 201516 4月 2015

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
9524
ISSN(列印)0277-786X
ISSN(電子)1996-756X

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???event.eventtypes.event.conference???3rd International Conference on Optical and Photonic Engineering, icOPEN 2015
國家/地區Singapore
城市Singapore
期間14/04/1516/04/15

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