Influence of deposition parameters in the fabrication of a large-area narrow band-pass filter of bandwidth on subnanometer scale

Keyphrases

• Bandpass Filter 100%
• Sub-nanometer 100%
• Deposition Parameters 100%
• Ion Beam 33%
• Ion Distribution 33%
• Substrate Temperature 33%
• Deposition Rate 33%
• Layer Thickness 33%
• Optical Constants 33%
• Dense Wavelength Division multiplexing 33%
• Small Fluctuation 33%
• Vacuum Condition 33%
• Distribution Rate 33%
• Composite Layer 33%
• Ion Current Density 33%
• Vacuum Deposition 33%
• Work Analysis 33%
• Rotating Substrate 33%

Engineering

• Bandpass Filter 100%
• Deposition Parameter 100%
• Experimental Result 33%
• Substrate Temperature 33%
• Layer Thickness 33%
• Deposition Rate 33%
• Dense Wavelength Division Multiplexing 33%
• Ion Current Density 33%