In situ plasma monitoring of PECVD nc-Si:H Films and the influence of dilution ratio on structural evolution

Yu Lin Hsieh, Li Han Kau, Hung Jui Huang, Chien Chieh Lee, Yiin Kuen Fuh, Tomi T. Li

研究成果: 雜誌貢獻期刊論文同行評審

16 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds