Improving the gas barrier property of SiOx:C thin films deposited by RF magnetron sputtering

Chien Cheng Kuo, Meng Chi Li, Shih Fang Liao, Chin Lun Wei, Hung Sen Wei, Cheng Chung Lee

研究成果: 雜誌貢獻期刊論文同行評審

4 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds