Improvement of silicon solar cell efficiency by ion beam sputtered deposition of AlO_xN_y thin films

Keyphrases

• P-type 100%
• Silicon Solar Cells 100%
• Ion Beam 100%
• Solar Cell Efficiency 100%
• Annealing 100%
• AlN Thin Film 50%
• Negative Charge 50%
• Silicon Wafer 50%
• Fixed Charge Density 50%
• Oxygen Atmosphere 50%
• Voltage Analysis 50%
• Charge Materials 50%
• Ion Beam Sputtering 50%
• Surface Recombination Velocity 50%
• Passivated 50%
• Capacitance-voltage 50%

Material Science

• Thin Films 100%
• Silicon Solar Cell 100%
• Surface (Surface Science) 100%
• Annealing 66%
• Capacitance 33%
• Silicon 33%
• Silicon Wafer 33%
• Density 33%
• Aluminum Nitride 33%
• Solar Cell 33%

Engineering

• Thin Films 100%
• Solar Cell 100%
• Charge Density 50%
• Negative Charge 50%
• Silicon Wafer 50%
• Surface Recombination Velocity 50%