Improved performance of InGaAs/InAlAs single photon avalanche diode with dual multiplication layers

Ping Li Wu, Yan Min Liao, Chi En Chen, Yu Jie Teng, Yu Ying Hung, Jin Wei Shi, Yi Shan Lee

研究成果: 雜誌貢獻會議論文同行評審

摘要

The performance of InGaAs/InAlAs single photon avalanche diodes (SPAD) was improved with fabrication in triple mesa. Current SPADs achieve better dark count rate of 5 × 104 Hz/μm2 for single photon detection efficiency of 31% at RT.

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文章編號STu1B.4
期刊Optics InfoBase Conference Papers
出版狀態已出版 - 2021
事件Optical Sensors, Sensors 2021 - Part of OSA Optical Sensors and Sensing Congress 2021 - Virtual, Online, United States
持續時間: 19 7月 202123 7月 2021

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