摘要
The performance of InGaAs/InAlAs single photon avalanche diodes (SPAD) was improved with fabrication in triple mesa. Current SPADs achieve better dark count rate of 5 × 104 Hz/μm2 for single photon detection efficiency of 31% at RT.
原文 | ???core.languages.en_GB??? |
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文章編號 | STu1B.4 |
期刊 | Optics InfoBase Conference Papers |
出版狀態 | 已出版 - 2021 |
事件 | Optical Sensors, Sensors 2021 - Part of OSA Optical Sensors and Sensing Congress 2021 - Virtual, Online, United States 持續時間: 19 7月 2021 → 23 7月 2021 |