@inproceedings{913f35c815524e818988760b7bfb8fb4,
title = "Implementation of a wafer positioning system",
abstract = "This study implements a system for determining the precise location of a moving wafer in a process chamber. An array of optical sensors positioned along an axis transverse to the path of a moving wafer is employed in this wafer positioning system. A computer program for wafer center calculation is developed based on the time dependent signals from the optical sensing module. The developed computer program has a human machine interface, and estimates the center position as well as the moving direction of the wafer.",
keywords = "Beam-breaking, Human Machine Interface, Wafer Positioning",
author = "Chen, {Yi Cheng} and Lee, {Yun Yen} and Lee, {Ju Yi} and Chen, {Jian You}",
year = "2011",
language = "???core.languages.en_GB???",
isbn = "9784907764395",
series = "Proceedings of the SICE Annual Conference",
publisher = "Society of Instrument and Control Engineers (SICE)",
pages = "1938--1943",
booktitle = "SICE 2011 - SICE Annual Conference 2011, Final Program and Abstracts",
note = "50th Annual Conference on Society of Instrument and Control Engineers, SICE 2011 ; Conference date: 13-09-2011 Through 18-09-2011",
}