Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis

Wei Yu Zhou, Hsuan Fan Chen, Xue Li Tseng, Hsiao Han Lo, Peter J. Wang, Ming Yu Jiang, Yiin Kuen Fuh, Tomi T. Li

研究成果: 雜誌貢獻期刊論文同行評審

1 引文 斯高帕斯(Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds