Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

Rong Seng Chang; Der Chin Chen

doi:10.1117/12.134871.full

Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

Rong Seng Chang, Der Chin Chen

光電科學與工程學系

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

摘要

In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

原文	???core.languages.en_GB???
頁（從 - 到）	276-282
頁數	7
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	1531
DOIs	https://doi.org/10.1117/12.134871.full
出版狀態	已出版 - 1 1月 1992
事件	Advanced Optical Manufacturing and Testing II 1991 - San Diego, United States 持續時間: 21 7月 1991 → …

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10.1117/12.134871.full

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@article{1779415fa8a14629b8633d712e416e02,

title = "Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping",

abstract = "In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.",

author = "Chang, {Rong Seng} and Chen, {Der Chin}",

year = "1992",

month = jan,

day = "1",

doi = "10.1117/12.134871.full",

language = "???core.languages.en_GB???",

volume = "1531",

pages = "276--282",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

}

TY - JOUR

T1 - Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

AU - Chang, Rong Seng

AU - Chen, Der Chin

PY - 1992/1/1

Y1 - 1992/1/1

N2 - In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

AB - In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

UR - http://www.scopus.com/inward/record.url?scp=85075521444&partnerID=8YFLogxK

U2 - 10.1117/12.134871.full

DO - 10.1117/12.134871.full

M3 - 會議論文

AN - SCOPUS:85075521444

SN - 0277-786X

VL - 1531

SP - 276

EP - 282

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Advanced Optical Manufacturing and Testing II 1991

Y2 - 21 July 1991

ER -

Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

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