High-reflectivity Pd/Ni/Al/Ti/Au ohmic contacts to p-type GaN for ultraviolet light-emitting diodes

Guan Ting Chen, Chang Chi Pan, Chi Shin Fang, Tzu Chien Huang, Jen Inn Chyi, Mae Nan Chang, Sheng Bang Huang, Jung Tsung Hsu

研究成果: 雜誌貢獻期刊論文同行評審

15 引文 斯高帕斯(Scopus)

摘要

The investigation of the thermal stability, optical reflectivity and contact resistivity of Pd/Ni/Al/Ti/Au ohmic contacts to p-type GaN was discussed. It was shown that incontrast to its Pd/Al/Ti/Au counterparts, Pd/Ni/Al/Ti/Au contacts retained their specific contact resistivity and reflectivity after long-term annealing at 150°C in nitrogen ambient. It was suggested that the Ni layer prevents the penetration of Ti into GaN during thermal treatment. The Pd/Ni/Al/Ti/Au contact was subjected to a long-term thermal aging test.

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頁(從 - 到)2797-2799
頁數3
期刊Applied Physics Letters
85
發行號14
DOIs
出版狀態已出版 - 4 10月 2004

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