High performacne InAs/AlSb HEMT with refractory iridium Schottky gate metal

Wen Yu Lin, Chao Hung Chen, Hsien Chin Chiu, Fan Hsiu Huang, W. J. Hsueh, Yue Ming Hsin, Jen Inn Chyi

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In the work, a novel approach in fabricating high-performance of InAs/AlSb high electron mobility transistors using iridium (Ir) gate technology was proposed and investigated. The Ir-gate exhibited a superior metal work function which was beneficial for increasing Schottky barrier height (FB) of InAs/AlSb heterostructure from 0.54 to 0.58 eV. The Ir-gate InAs/AlSb HEMT exhibited a Vth of -0.9 V, a maximum drain current of 270 mA/mm, and a peak transconductance of 420 mS/mm. In contrast, the Vth of Ti-gate InAs/AlSb HEMT was -1.5 V, a maximum drain current of 257mA/mm, and a peak transconductance of 280mS /mm, respectively. It was suggested that Ir interface presented a high potential for high power transistor applications.

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主出版物標題2013 International Conference on Indium Phosphide and Related Materials, IPRM 2013
DOIs
出版狀態已出版 - 2013
事件2013 25th International Conference on Indium Phosphide and Related Materials, IPRM 2013 - Kobe, Japan
持續時間: 19 5月 201323 5月 2013

出版系列

名字Conference Proceedings - International Conference on Indium Phosphide and Related Materials
ISSN(列印)1092-8669

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???event.eventtypes.event.conference???2013 25th International Conference on Indium Phosphide and Related Materials, IPRM 2013
國家/地區Japan
城市Kobe
期間19/05/1323/05/13

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