High-intensity nanosecond all-fiber-coiled laser and extreme ultraviolet generation

Chun Lin Chang, Yen Yin Li, Po Yen Lai, Yi Ping Lai, Chien Wei Huang, Shih Hung Chen, Sheng Lung Huang

研究成果: 書貢獻/報告類型會議論文篇章同行評審


High-efficiency fiber-based extreme ultraviolet driver in the alignment-free configuration has been experimentally achieved with a maximum intensity of 6.4×1010 W/cm2 on target at a repetition rate of 20 kHz. The output EUV signal within 10∼20 nm in wavelength was confirmed with a Si/Zr-coated x-ray photodiode by varying numbers of Be and Al foil filters. The measured spectral range is consistent with that obtained by the weighted oscillator strengths of Sn8+ to Sn+13 ions using an one-dimensional hydrodynamic code coupled with the ionization model of collisional-radiative equilibrium. The driver is based on a 1064-nm nanosecond coiled ytterbium all-fiber laser system in diode-seeded master oscillator power amplification. With an overall optical efficiency up to 56%, it can deliver a 1.16-mJ, 117-kW, 6.1-ns laser pulses with a FWHM linewidth of 10 nm and beam propagation factor of M2∼1.55. The full advantages of using fiber laser for a movable LPP EUV metrology source are revealed.

主出版物標題Fiber Lasers XII
主出版物子標題Technology, Systems, and Applications
編輯John Ballato, L. Brandon Shaw
出版狀態已出版 - 2015
事件Fiber Lasers XII: Technology, Systems, and Applications - San Francisco, United States
持續時間: 9 2月 201512 2月 2015


名字Proceedings of SPIE - The International Society for Optical Engineering


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國家/地區United States
城市San Francisco


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