@inproceedings{e2b083d6bd97493faac77dc7629a9533,
title = "High fidelity loud microspeaker based on PZT bimorph diaphragm",
abstract = "This paper describes a microspeaker (composed of a 8 × 8 mm 2 square mechanically-polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 11 kHz. The microspeaker with an encapsulating cylindrical package of about 0.7 cc inside volume produces sound pressure level (SPL) of 118 ~ 125 dB between 1 and 10 kHz when measured 5 mm away from the diaphragm with 190V pcak-to-pcak sinusoidal input. The maximum displacement at the center of the diaphragm was measured to be 7.25 μm at the fundamental resonance frequency of 14.3 kHz, and the corresponding sound pressure level (SPL) was measured to be 133 dB.",
keywords = "Bimorph, Diaphragm, High fidelity, Loud microspeaker, PZT",
author = "Youngki Choe and Chen, {Shih Jui} and Kim, {Eun Sok}",
year = "2010",
language = "???core.languages.en_GB???",
isbn = "9781439834022",
series = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010",
pages = "316--319",
booktitle = "Nanotechnology 2010",
note = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 ; Conference date: 21-06-2010 Through 24-06-2010",
}