Heteroepitaxial diamond nucleation and growth on silicon by microwave plasma-enhanced chemical vapor deposition synthesis

X. J. Guo, S. L. Sung, J. C. Lin, F. R. Chen, H. C. Shih

研究成果: 雜誌貢獻期刊論文同行評審

10 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds