Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement

Ju Yi Lee, Hung Lin Hsieh, Zhi Ying Lin

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this study, a heterodyne grating interferometer based on the sinusoidal phase modulation method for displacement measurements was proposed. The interference beams were modulated using a sinusoidal oscillating grating, and the proposed frequency-domain quadrature detection method was used to detect the optical phase of the interferometer and determine the displacement. Experimental results were consistent with the strain gauge results for several displacement ranges. When only high-frequency noise was considered, our method achieved a measurement resolution of approximately 2 nm.

原文???core.languages.en_GB???
主出版物標題Optical Measurement Systems for Industrial Inspection X
編輯Peter Lehmann, Armando Albertazzi Goncalves, Wolfgang Osten
發行者SPIE
ISBN(電子)9781510611030
DOIs
出版狀態已出版 - 2017
事件Optical Measurement Systems for Industrial Inspection X 2017 - Munich, Germany
持續時間: 26 6月 201729 6月 2017

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
10329
ISSN(列印)0277-786X
ISSN(電子)1996-756X

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???event.eventtypes.event.conference???Optical Measurement Systems for Industrial Inspection X 2017
國家/地區Germany
城市Munich
期間26/06/1729/06/17

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