Growth of hydrogenated microcrystalline silicon thin films using electron cyclotron resonance chemical deposition method

Teng Hsiang Chang, Yen Ho Chu, Chien Chieh Lee, Jenq Yang Chang, Tomi T. Li, I. Chen Chen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

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Engineering & Materials Science