@article{f13d6fd712dd4671b9c6995ebfb4ec09,
title = "Gravity-assisted seeding control for 1-D material growth",
abstract = "This letter presents a seeding control scheme by utilizing gravity force to form an agglomeration of molten Co seeds on a patterned inverted silicon nanopyramid. Nanometer sized molten Co seeds formed on a nonwettable inverted pyramid surface can roll along the inclination followed by aggregation to form a singular seed with the size depending on the pyramid size and the thickness of as-deposited Co film inside the pyramid. The proposed scheme allowing the formation of well-aligned catalytic seeds with manipulated size will promise the control growth of 1-D material for practical integrated microelectronic device fabrication.",
keywords = "1-D material, 3D-IC, Gravity-assisted, Integrated nanoelectronic circuit, Seeding control",
author = "Chen, {C. C.} and Hsu, {Lun Hao} and Kai Rern and Cheng, {Y. T.} and Hsieh, {Yi Fan} and Wu, {Pu Wei}",
note = "Funding Information: Manuscript received February 26, 2009; revised April 15, 2009. First published May 27, 2009; current version published July 9, 2009. This work was supported in part by the National Science Council (NSC) of R. O. C. under Grant NSC 97-2220-E-009-024. The review of this paper was arranged by Associate Editor S. Krishna.",
year = "2009",
month = jul,
doi = "10.1109/TNANO.2009.2023320",
language = "???core.languages.en_GB???",
volume = "8",
pages = "427--430",
journal = "IEEE Transactions on Nanotechnology",
issn = "1536-125X",
number = "4",
}