Gratings in GaN membranes

Chii Chang Chen, Chia Hung Hou, Jinn Kong Sheu, Jenq Yang Chang, L. I. Ming-Hung, Gou Chung Chi, Chuck Wu

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)

摘要

In this work, gratings are fabricated on the GaN thin film grown on the silicon substrates. GaN membranes are obtained by removing the silicon below the GaN gratings. The samples are stacked on the GaN diffractive microlenses on sapphire substrates fabricated using gray-level masks. The stacked components are characterized using a He-Ne laser. The laser beam is collimated by the GaN microlenses and diffracted by the GaN gratings. The result demonstrates a stacked microoptics systems in GaN-based materials for the first tune.

原文???core.languages.en_GB???
頁(從 - 到)5854-5856
頁數3
期刊Japanese Journal of Applied Physics
43
發行號8 B
DOIs
出版狀態已出版 - 8月 2004

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