Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou; Ming Hung Li; Chii Chang Chen; Jenq Yang Chang; Jinn Kong Sheu; Gou Chung Chi; Chuck Wu; Wei Tai Cheng; Jui Hung Yeh

doi:10.1007/s10043-003-0287-1

Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou, Ming Hung Li, Chii Chang Chen, Jenq Yang Chang, Jinn Kong Sheu, Gou Chung Chi, Chuck Wu, Wei Tai Cheng, Jui Hung Yeh

光電科學與工程學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

3 引文斯高帕斯（Scopus）

摘要

In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 10².

原文	???core.languages.en_GB???
頁（從 - 到）	287-289
頁數	3
期刊	Optical Review
卷	10
發行號	4
DOIs	https://doi.org/10.1007/s10043-003-0287-1
出版狀態	已出版 - 2003

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10.1007/s10043-003-0287-1

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@article{363c311017404659a37e95ece87f9d28,

title = "Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System",

abstract = "In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.",

keywords = "AlN, Band-pass filter, Diffractive microlens, GaN, Gray-level mask, Solar-blind",

author = "Hou, {Chia Hung} and Li, {Ming Hung} and Chen, {Chii Chang} and Chang, {Jenq Yang} and Sheu, {Jinn Kong} and Chi, {Gou Chung} and Chuck Wu and Cheng, {Wei Tai} and Yeh, {Jui Hung}",

year = "2003",

doi = "10.1007/s10043-003-0287-1",

language = "???core.languages.en_GB???",

volume = "10",

pages = "287--289",

journal = "Optical Review",

issn = "1340-6000",

number = "4",

}

TY - JOUR

T1 - Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

AU - Hou, Chia Hung

AU - Li, Ming Hung

AU - Chen, Chii Chang

AU - Chang, Jenq Yang

AU - Sheu, Jinn Kong

AU - Chi, Gou Chung

AU - Wu, Chuck

AU - Cheng, Wei Tai

AU - Yeh, Jui Hung

PY - 2003

Y1 - 2003

N2 - In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

AB - In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

KW - AlN

KW - Band-pass filter

KW - Diffractive microlens

KW - GaN

KW - Gray-level mask

KW - Solar-blind

UR - http://www.scopus.com/inward/record.url?scp=0242408309&partnerID=8YFLogxK

U2 - 10.1007/s10043-003-0287-1

DO - 10.1007/s10043-003-0287-1

M3 - 期刊論文

AN - SCOPUS:0242408309

SN - 1340-6000

VL - 10

SP - 287

EP - 289

JO - Optical Review

JF - Optical Review

IS - 4

ER -

Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

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