@inproceedings{e1f6672ce5064ea58c4e6fee7df65758,
title = "Frequency-multiplexed combinatory mass sensing with single data line from multiple integrated film bulk acoustic resonators",
abstract = "This paper presents a novel array of four film bulk acoustic resonators (FBAR) having four distinct fundamental resonant frequencies that offers parallel and/or combinatory mass sensing of multiple chembio species, such as various proteins. To achieve the multiple resonant frequencies, we connect multiple FBARs (having slightly different resonant frequencies, thus each representing a unique sensor) in parallel, and form one FBAR (out of the multiple) on a chip. This way, when we measure the frequency shifts of the arrayed FBAR through a network analyzer, we have multiple resonant frequencies, each of which will change as a function of added mass (of chembio species), independent of the others.",
keywords = "FBAR, Film bulk acoustic resonator, mass sensing",
author = "Chen, {S. J.} and A. Lin and L. Wang and Kim, {E. S.}",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969287",
language = "???core.languages.en_GB???",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "783--786",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}