Frequency-interleaved MEMS ultrasound transducer

Shih Jui Chen, Youngki Choe, Eun Sok Kim

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

This paper presents a sensitive, broad-bandwidth MEMS ultrasound transducer based on frequency interleaving of resonant transducers. Cantilever-like diaphragm transducers with piezoelectric ZnO films have been connected in parallel, so that the sensitivity as a receiver and the sound output as a transmitter are measured to be about 30 times larger than those of a single transducer. The interleaving of the transducers not only increases the sensitivity but also broadens the useable bandwidth greatly.

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主出版物標題Nanotechnology 2010
主出版物子標題Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
頁面312-315
頁數4
出版狀態已出版 - 2010
事件Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 - Anaheim, CA, United States
持續時間: 21 6月 201024 6月 2010

出版系列

名字Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
2

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???event.eventtypes.event.conference???Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
國家/地區United States
城市Anaheim, CA
期間21/06/1024/06/10

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