Formation mechanism of SiGe nanorod arrays by combining nanosphere lithography and Au-assisted chemical etching

Keyphrases

• Chemical Etching 100%
• SiGe 100%
• Nanosphere Lithography 100%
• Formation Mechanism 100%
• Nanorod Arrays 100%
• Etching Temperature 28%
• High Temperature 14%
• Temperature Effect 14%
• Nanostructures 14%
• Transmission Electron Microscopy 14%
• Etching Process 14%
• Etching Rate 14%
• Anisotropic Etching 14%
• Etching Time 14%
• Redox Reaction 14%
• Electron Beam Scanning 14%
• Temperature Sensitivity 14%
• Scanning Electron Microscopy Analysis 14%
• Corrosion Reaction 14%

Material Science

• Lithography 100%
• Nanorod 100%
• Nanosphere 100%
• Scanning Electron Microscopy 50%
• Transmission Electron Microscopy 50%
• Corrosion 50%
• Anisotropic Etching 50%
• Electron Microscopy 50%
• Redox Process 50%
• Nanostructure 50%