Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

J. H. He; W. W. Wu; Y. L. Chueh; C. L. Hsin; L. J. Chen; L. J. Chou

doi:10.1063/1.2136219

Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

J. H. He, W. W. Wu, Y. L. Chueh, C. L. Hsin, L. J. Chen, L. J. Chou

電機工程學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

14 引文斯高帕斯（Scopus）

摘要

The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

原文	???core.languages.en_GB???
文章編號	223102
頁（從 - 到）	1-3
頁數	3
期刊	Applied Physics Letters
卷	87
發行號	22
DOIs	https://doi.org/10.1063/1.2136219
出版狀態	已出版 - 2005

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10.1063/1.2136219

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title = "Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots",

abstract = "The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.",

author = "He, {J. H.} and Wu, {W. W.} and Chueh, {Y. L.} and Hsin, {C. L.} and Chen, {L. J.} and Chou, {L. J.}",

note = "Funding Information: The research is supported by the Republic of China National Science Council Grant No. NSC 92-2112-M-029-011 and Ministry of Education Grant No. 91-E-FA04-1-4.",

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T1 - Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

AU - He, J. H.

AU - Wu, W. W.

AU - Chueh, Y. L.

AU - Hsin, C. L.

AU - Chen, L. J.

AU - Chou, L. J.

N1 - Funding Information: The research is supported by the Republic of China National Science Council Grant No. NSC 92-2112-M-029-011 and Ministry of Education Grant No. 91-E-FA04-1-4.

PY - 2005

Y1 - 2005

N2 - The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

AB - The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

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Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

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