@inproceedings{08e299b43cff46b6b26975859acd8cd1,
title = "Film bulk acoustic resonators for parallel mass sensing",
abstract = "This paper describes the principle of array sensing with film bulk acoustic resonators (FBARs) for combinatory mass sensing and the use of the arrayed FBAR resonant mass sensor for parallel detection of protein-ligand reactions in liquid environment. Various ligands were immobilized on the gold layer on the FBAR's sensing surface for selective protein detection. The FBARs of the arrayed FBAR were fabricated to have different resonant frequencies from one another by adding slightly varied amount of mass loading on the resonators. Results showed that the arrayed FBAR could detect specific bindings on its surfaces as the concentration of the target ligand was varied.",
author = "Chen, {Shih Jui} and Anderson Lin and Lukas Baumgartel and Kim, {Eun Sok}",
note = "Funding Information: This research is supported by the National Institutes of Health under grant R21HG005118.; 2011 MRS Spring Meeting ; Conference date: 25-04-2011 Through 29-04-2011",
year = "2011",
doi = "10.1557/opl.2011.1521",
language = "???core.languages.en_GB???",
isbn = "9781618395474",
series = "Materials Research Society Symposium Proceedings",
pages = "27--32",
booktitle = "Hybrid Interfaces and Devices",
}