Facile fabrication of periodic arrays of vertical Si nanoholes on (001)Si substrate with broadband light absorption properties

Engineering & Materials Science

• Light absorption 100%
• Etching 71%
• Fabrication 48%
• Substrates 46%
• Nanospheres 36%
• Surface plasmon resonance 35%
• Multiple scattering 33%
• Wet etching 30%
• Photolithography 27%
• Optoelectronic devices 25%
• Lithography 24%
• Masks 20%
• Temperature 8%
• Experiments 7%

Physics & Astronomy

• electromagnetic absorption 68%
• etching 49%
• broadband 46%
• fabrication 40%
• micrometers 30%
• absorptance 20%
• photolithography 18%
• surface plasmon resonance 16%
• optoelectronic devices 16%
• aqueous solutions 15%
• masks 14%
• lithography 13%
• adjusting 13%
• spacing 12%
• augmentation 10%
• room temperature 9%
• scattering 8%

Chemical Compounds

• Etching 59%
• Nanodisc 44%
• NIR Spectroscopy 16%
• Nanosphere 16%
• Optoelectronics 14%
• Shape 10%
• Ambient Reaction Temperature 9%
• Aqueous Solution 8%
• Time 5%
• Surface 5%
• Application 5%