Facile fabrication of periodic arrays of vertical Si nanoholes on (001)Si substrate with broadband light absorption properties

Keyphrases

• Facile Fabrication 100%
• Si Substrate 100%
• Periodic Array 100%
• Si Nanohole 100%
• Broadband Absorption 100%
• Optical Absorption Property 100%
• Au Nanodisk 100%
• Nanohole 40%
• Si Etching 40%
• High Efficiency 20%
• Room Temperature 20%
• Absorptance 20%
• Localized Surface Plasmon Resonance 20%
• Surface Texture 20%
• Aqueous Solution 20%
• Wet Etching 20%
• Etching Process 20%
• Sub-micrometer 20%
• Depth-dependent 20%
• Nanosphere Lithography 20%
• Pattern-based Approach 20%
• Vertically Aligned 20%
• Near-IR Region 20%
• Photolithography 20%
• Photovoltaic Devices 20%
• Visible Light Region 20%
• Array-based 20%
• Nanohole Array 20%
• Etching Time 20%
• Hard Mask 20%
• Morphology Control 20%
• Multiple Light Scattering 20%
• Self-assembled Nanosphere 20%
• Light Surfaces 20%
• Hydrophobic Behavior 20%
• Broadband Absorption Enhancement 20%

Material Science

• Lithography 100%
• Wet Etching 100%
• Nanosphere 100%
• Photovoltaics 100%
• Surface (Surface Science) 100%
• Surface Plasmon Resonance 100%