Fabrication of two-dimensional microstructures by using micro-anode-guided electroplating with real-time image processing

研究成果: 雜誌貢獻期刊論文同行評審

7 引文 斯高帕斯(Scopus)

摘要

The purpose of this research was to develop a new micro-anode-guided electroplating (MAGE) system equipped by an image-guided positioning controller, to fabricate two-dimensional microstructures. From real-time image, the relative positions of the micro-anode and the microstructures tip can be located and maintained. When the relative position is adjusted, the deposition direction of the microstructures can be controllable and microstructures with different geometries can be fabricated.

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頁(從 - 到)P268-P271
期刊ECS Journal of Solid State Science and Technology
3
發行號7
DOIs
出版狀態已出版 - 2014

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