摘要
The purpose of this research was to develop a new micro-anode-guided electroplating (MAGE) system equipped by an image-guided positioning controller, to fabricate two-dimensional microstructures. From real-time image, the relative positions of the micro-anode and the microstructures tip can be located and maintained. When the relative position is adjusted, the deposition direction of the microstructures can be controllable and microstructures with different geometries can be fabricated.
原文 | ???core.languages.en_GB??? |
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頁(從 - 到) | P268-P271 |
期刊 | ECS Journal of Solid State Science and Technology |
卷 | 3 |
發行號 | 7 |
DOIs | |
出版狀態 | 已出版 - 2014 |