Fabrication of silicon nanostructure by metal-assisted etching and its effects to matrix-free laser desorption/ionization mass spectrometry

C. W. Tsao, J. T. Huang, Y. C. Cheng, W. Y. Chen, C. C. Chien

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

Silicon nanostructure surface fabricated from metal-assisted etching have been demonstrated as high sensitivity matrix-free laser desorption/ionization mass spectrometry chip. The silicon nanostructure morphology was found to have direct effect to the mass spectrometry ionization efficiency. Creation of different silicon nanostructure morphologies by changing the metal thickness, etching time and etchant composition in metal-assisted process was explored and its effects to mass spectrometry ionization efficiency was investigated in this paper.

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主出版物標題14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
頁面1286-1288
頁數3
出版狀態已出版 - 2010
事件14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
持續時間: 3 10月 20107 10月 2010

出版系列

名字14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
2

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???event.eventtypes.event.conference???14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
國家/地區Netherlands
城市Groningen
期間3/10/107/10/10

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