Fabrication of new composite abrasive for jet machining and application to scrap wafer regeneration

Keyphrases

• Wafer 100%
• Regeneration 100%
• New Composite Materials 100%
• Jet Machining 100%
• Composite Abrasive 100%
• Scrap 100%
• Surface Roughness 50%
• Abrasive Jet Machining 33%
• Silicon Wafer 16%
• Polystyrene 16%
• Abrasive 16%
• SiC Particle Size 16%
• SiC Particles 16%
• Novel Composite 16%
• Polymer Surface 16%
• Processing Time 16%
• Micromachining 16%
• Direct Impact 16%
• Thermoplastic Polymer 16%
• Hard Brittle Material 16%
• Coating Temperature 16%
• Small Crack 16%
• Shallow Crack 16%
• Machining Properties 16%

Engineering

• Abrasive 100%
• Abrasive Jet 100%
• Silicon Wafer 50%
• Size of Particle 50%
• Processing Time 50%
• Micro Machining 50%
• Polymer Surface 50%
• Base Material 50%
• Brittleness 50%

Material Science

• Machining 100%
• Composite Material 100%
• Surface Roughness 50%
• Abrasive Jet Machining 33%
• Surface (Surface Science) 33%
• Abrasive 33%
• Silicon Wafer 16%
• Polystyrene 16%
• Thermoplastics 16%
• Brittleness 16%