Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering

Hsuan Wen Wang, Wei Ning Su, Chia Wei Han, Sheng Hui Chen, Cheng Chung Lee

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

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Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds