Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering

Hsuan Wen Wang, Wei Ning Su, Chia Wei Han, Sheng Hui Chen, Cheng Chung Lee

研究成果: 書貢獻/報告類型會議論文篇章同行評審

指紋

深入研究「Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering」主題。共同形成了獨特的指紋。

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds