Fabrication of highly c-axis textured ZnO thin films piezoelectric transducers by RF sputtering

Keyphrases

• RF Power 100%
• Substrate Temperature 100%
• C-axis 100%
• Textured ZnO 100%
• Piezoelectric Transducer 100%
• RF Sputtering 100%
• Piezoelectric Thin Film 100%
• ZnO Thin Films 100%
• ZnO Film 100%
• Gas Flow Ratio 66%
• Film Properties 33%
• Fabrication Parameters 33%
• Si Substrate 33%
• Bottom Electrode 33%
• Deposition Pressure 33%
• Feasibility Conditions 33%
• Sputtering Parameters 33%
• Textured Film 33%
• Al-Si 33%
• TiO2-SiO2 33%
• Al-ZnO 33%
• Gas Mixture 33%
• Deposition Conditions 33%
• Deposition Rate 33%

Engineering

• Thin Films 100%
• Transducer 100%
• Substrate Temperature 100%
• Piezoelectric 100%
• Gas Flow 66%
• Si Substrate 33%
• Deposition Condition 33%
• Film Property 33%
• Deposition Rate 33%

Material Science

• Thin Films 100%
• ZnO 100%
• Piezoelectricity 100%
• Transducer 100%
• Film 80%
• Gas Flow 40%