Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

Shih Shou Lo, Hua Kung Chiu, Chii Chang Chen, Shih Chieh Hsu, Cheng Yi Liu

研究成果: 雜誌貢獻期刊論文同行評審

10 引文 斯高帕斯(Scopus)

摘要

This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.

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頁(從 - 到)2592-2594
頁數3
期刊IEEE Photonics Technology Letters
17
發行號12
DOIs
出版狀態已出版 - 12月 2005

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