摘要
This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.
原文 | ???core.languages.en_GB??? |
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頁(從 - 到) | 2592-2594 |
頁數 | 3 |
期刊 | IEEE Photonics Technology Letters |
卷 | 17 |
發行號 | 12 |
DOIs | |
出版狀態 | 已出版 - 12月 2005 |