@inproceedings{d11a68e5f6434f5c86de7e81aacb724e,
title = "Fabricating a silicon microlens mold by ICP dry etching",
abstract = "In this paper, a silicon mold, with spherical/aspherical concave microlens arrays, was made by using ICP dry etching technique. A PMMA microlens was molded by using this mold and then tested by SEM, Dektakprofiler and etc.",
keywords = "Dry-etching, Microlens array, Mold process",
author = "Chen, {R. L.} and Wang, {C. M.} and Chang, {J. Y.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",
year = "2003",
doi = "10.1109/CLEOPR.2003.1277112",
language = "???core.languages.en_GB???",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "565",
booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",
}