Experimental investigation of a flowing fluid layer on metal surface roughness measurement and aberration correction using adaptive optics

Yiin Kuen Fuh, Jia Ren Fan

研究成果: 雜誌貢獻期刊論文同行評審

5 引文 斯高帕斯(Scopus)

摘要

The induced optical aberration of laser beam passing through a transparent flowing fluid layer on a metal specimen is experimentally and empirical formula studied. The proposed study presents an experimental investigation of metal surface roughness measurement by combining an optical probe of laser-scattering phenomena and adaptive optics (AO) for aberration correction. In the absence of the AO correction scheme, induced flow velocity of 0.278 m/s can severely degrade the residual wavefront root mean square (RMS) error to 0.58 μm and decrease the scattered laser intensity. Real-time AO correction in closed-loop at a sampling rate of 8Hz can reduce the wavefront RMS error to 0.19 μm and improve the attenuation of scattered laser intensity. The maximum relative error of the estimated roughness (R a) is less than 7.8% compared with the stylus method. The experimental results show satisfactory correction in the presence of a flowing fluid layer using the AO system.

原文???core.languages.en_GB???
頁(從 - 到)433-437
頁數5
期刊Optical Review
20
發行號5
DOIs
出版狀態已出版 - 9月 2013

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