Epitaxial AlN thin film surface acoustic wave devices prepared on GaN/sapphire using low-temperature helicon sputtering system

H. L. Kao, W. C. Chen, Wei Cheng Chien, Hui Feng Lin, Tzu Chien Chen, Chung Yi Lin, Y. T. Lin, J. I. Chyi, C. H. Hsu

研究成果: 雜誌貢獻期刊論文同行評審

14 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy