Enhancing the resonance quality factor in membrane-type resonant grating waveguides

In this Letter, we present a method of reducing the spectral width of guided-mode resonance (GMR) in air-bridged resonant grating-waveguide structures to enhance the Q factor. The posttreatment of adding a dielectric film to the bottom of the membrane to manipulate the resonance behavior is practicable. The introduced underlayer is shown to be capable of effectively reducing the coupling and enhancing the resonant Q factor. The proposed method provides an effective means of adjusting the resonance property without varying the original GMR structure. The results also imply that TM resonance is more feasible for achieving narrow resonance and potentially in sensing applications, because it has higher sensitivity than TE resonance.