Enhanced wear resistance of the Cr-based thin film coating on micro drill by doping with W-C-N

C. W. Chu, Jason S.C. Jang, H. W. Chen, T. L. Chuang

研究成果: 雜誌貢獻期刊論文同行評審

15 引文 斯高帕斯(Scopus)

摘要

The microstructure and performance of micro drills coated with Cr, Cr2N, and CrWCN thin films for applying to drill the PCB (printed circuit board) at high rpm (400 krpm) were systematically investigated by means of AFM, TEM, nano indentation and scratch test in this study. The results of properties evaluation for these coatings on the tungsten drill samples revealed that the doping of W accompanied with pursing C2H2 gas on the Cr2N coating effectively increases the hardness of Cr2N film from 8 GPa to 25 GPa and decreases the frictional coefficient from 0.35 to 0.25. In addition, when these three thin films were applied on the on-line test of drilling the PCB for 24,000 holes, the CrWCN thin film shows the best wear resistance among these three thin films, presenting the minimum flank wear and 4-5 times longer tool life than the uncoated samples. Therefore, the CrWCN thin film is suggested to be a prominent material for protective coatings according to its excellent wear resistance and adhesive capability.

原文???core.languages.en_GB???
頁(從 - 到)5197-5201
頁數5
期刊Thin Solid Films
517
發行號17
DOIs
出版狀態已出版 - 1 7月 2009

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