Enhanced growth of low-resistivity NiSi on epitaxial Si0.7Ge0.3 on (001)Si with a sacrificial amorphous Si interlayer

W. W. Wu, S. L. Cheng, S. W. Lee, L. J. Chen

研究成果: 雜誌貢獻期刊論文同行評審

18 引文 斯高帕斯(Scopus)

指紋

深入研究「Enhanced growth of low-resistivity NiSi on epitaxial Si0.7Ge0.3 on (001)Si with a sacrificial amorphous Si interlayer」主題。共同形成了獨特的指紋。

Keyphrases

Material Science