Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (0 0 1)Si 0.7 Ge 0.3 by nanosphere lithography with a thin interposing Si layer

S. L. Cheng, C. Y. Zhan, S. W. Lee, H. Chen

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

2 引文 斯高帕斯（Scopus）

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深入研究「Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (0 0 1)Si 0.7 Ge 0.3 by nanosphere lithography with a thin interposing Si layer」主題。共同形成了獨特的指紋。

Keyphrases

Material Science