Enhanced formation and morphological stability of low-resistivity CoSi 2 nanodot arrays on epitaxial Si0.7Ge0.3 virtual substrate

S. L. Cheng, C. Y. Yang, S. W. Lee, H. F. Hsu, H. Chen

研究成果: 雜誌貢獻期刊論文同行評審

指紋

深入研究「Enhanced formation and morphological stability of low-resistivity CoSi 2 nanodot arrays on epitaxial Si0.7Ge0.3 virtual substrate」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds