Electrochemical sensors produced by microelectronic fabrication techniques

C. C. Liu, R. R. Savinell, M. R. Neuman

研究成果: 雜誌貢獻會議論文同行評審


Electrochemical sensors are widely used either directly or as an integral part of a device for biological, environmental and other monitoring. Microelectronic fabrication technology can be used to make highly reproducible, small scale, geometrically well-defined structures in arrays of identical or different sensors. These technologies include thick and thin film deposition, photolithographic pattern definition and chemical and plasma etching. Thus, multiple or redundant sensors can be constructed on a single, relatively small substrate. Because of the advantages in the structure and size of electrochemical sensors produced by these fabrication techniques, new or classical sensing approaches can be exploited for the development of novel sensors. Miniature high temperature and ambient temperature electrochemical sensors will be used as examples to illustrate this approach to sensor development.

頁(從 - 到)4-6
期刊AIChE Symposium Series
出版狀態已出版 - 1989
事件Process Sensing and Diagnostics Symposium - Washington, DC, USA
持續時間: 27 11月 19882 12月 1988


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