Electrochemical etching of Si(001) in NH4F solutions: Initial stage and {111} microfacet formation

Shueh Lin Yau, Kazutoshi Kaji, Kingo Itaya

研究成果: 雜誌貢獻期刊論文同行評審

50 引文 斯高帕斯(Scopus)

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Physics & Astronomy