Electrochemical etching of Si(001) in NH4F solutions: Initial stage and {111} microfacet formation
Shueh Lin Yau, Kazutoshi Kaji, Kingo Itaya
研究成果: 雜誌貢獻 › 期刊論文 › 同行評審
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引文
斯高帕斯(Scopus)