Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

Yi Nung Chao; Yuan Jie Lu; Sheng Hui Chen

doi:10.1364/IPRSN.2023.JTu4A.34

Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

Yi Nung Chao, Yuan Jie Lu, Sheng Hui Chen

光電科學與工程學系

研究成果: 會議貢獻類型 › 會議論文 › 同行評審

摘要

HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.

原文	???core.languages.en_GB???
DOIs	https://doi.org/10.1364/IPRSN.2023.JTu4A.34
出版狀態	已出版 - 2023
事件	2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023 - Busan, Korea, Republic of 持續時間: 9 7月 2023 → 13 7月 2023

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???event.eventtypes.event.conference???	2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023
國家/地區	Korea, Republic of
城市	Busan
期間	9/07/23 → 13/07/23

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10.1364/IPRSN.2023.JTu4A.34

引用此

Chao, Y. N., Lu, Y. J., & Chen, S. H. (2023). Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS. 論文發表於 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of. https://doi.org/10.1364/IPRSN.2023.JTu4A.34

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title = "Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS",

abstract = "HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.",

author = "Chao, {Yi Nung} and Lu, {Yuan Jie} and Chen, {Sheng Hui}",

note = "Publisher Copyright: {\textcopyright} 2023 The Author (s).; 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023 ; Conference date: 09-07-2023 Through 13-07-2023",

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doi = "10.1364/IPRSN.2023.JTu4A.34",

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Chao, YN, Lu, YJ & Chen, SH 2023, 'Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS', 論文發表於 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of, 9/07/23 - 13/07/23. https://doi.org/10.1364/IPRSN.2023.JTu4A.34

Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS. / Chao, Yi Nung; Lu, Yuan Jie; Chen, Sheng Hui.
2023. 論文發表於 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of.

研究成果: 會議貢獻類型 › 會議論文 › 同行評審

TY - CONF

T1 - Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

AU - Chao, Yi Nung

AU - Lu, Yuan Jie

AU - Chen, Sheng Hui

PY - 2023

Y1 - 2023

N2 - HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.

AB - HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.

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U2 - 10.1364/IPRSN.2023.JTu4A.34

DO - 10.1364/IPRSN.2023.JTu4A.34

M3 - 會議論文

AN - SCOPUS:85193079105

T2 - 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023

Y2 - 9 July 2023 through 13 July 2023

ER -

Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

摘要

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