@inproceedings{435244095c054ed48d3c1f81d42cb294,
title = "Effects of microwave power on thermal annealing behaviors of hydrogenated amorphous silicon",
abstract = "In this study, we have investigated the recrystallization behaviors of hydrogenated amorphous silicon (a-Si:H) films by post-growth thermal annealing as a function of microwave power using electron cyclotron resonance chemical vapor deposition (ECRCVD). The crytallinity of annealed a-Si:H films depends on the porosity of the as-deposited thin films. We suggested that the film with high porosity has lowest crystallinity due to strong oxygen diffusion and formation of SiOx inside the film.",
author = "Wu, \{Ping Jung\} and Chen, \{I. Chen\} and Lee, \{Chien Chieh\} and Chang, \{Jenq Yang\} and Li, \{Tomi T.\} and Su, \{Chiung Chieh\}",
year = "2010",
doi = "10.1149/1.3553348",
language = "???core.languages.en\_GB???",
isbn = "9781607682233",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "17",
pages = "65--69",
booktitle = "Photovoltaics for the 21st Century 6\textbackslash{}",
edition = "17",
note = "Photovoltaics for the 21st Century 6 - 218th ECS Meeting ; Conference date: 10-10-2010 Through 15-10-2010",
}