Effects of different cusp magnetic ratios and crucible rotation conditions on oxygen transport and point defect formation during Cz silicon crystal growth

Thi Hoai Thu Nguyen, Jyh Chen Chen

研究成果: 雜誌貢獻期刊論文同行評審

5 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Material Science