Effects of Channel Thickness on DC/RF Performance of InAlGaN/AlN/GaN HEMTs

  • De Shieh
  • , Zheng Fong Lee
  • , Ming Yuan Lee
  • , Hui Yu Chen
  • , Chang Yan Hsieh
  • , Po Tsung Tu
  • , Po Chun Yeh
  • , Shyh Shyuan Sheu
  • , Wei Chung Lo
  • , Shih Chieh Chang
  • , Chang Hong Shen
  • , Jia Min Shieh
  • , Jen Inn Chyi

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this paper, we report the effect of 90-nm-gate InAlGaN/GaN HEMTs with 40 and 100 nm GaN channel thickness. The HEMTs with 40/100 nm channel layer exhibit an IDS sat of 839/931 mA/mm, and gm of 271/250 mS/mm, respectively. These results indicate that the thin channel devices have better control on channel conductivity, resulting in a higher peak gm. As for the RF performance, the cut-off frequency (FT) of the devices with 40/100 nm channel thickness is 112.3 GHz/94.2 GHz, respectively.

原文???core.languages.en_GB???
主出版物標題2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9798350360349
DOIs
出版狀態已出版 - 2024
事件2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Hsinchu, Taiwan
持續時間: 22 4月 202425 4月 2024

出版系列

名字2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Proceedings

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???event.eventtypes.event.conference???2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024
國家/地區Taiwan
城市Hsinchu
期間22/04/2425/04/24

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