Effects of Channel Thickness on DC/RF Performance of InAlGaN/AlN/GaN HEMTs

De Shieh, Zheng Fong Lee, Ming Yuan Lee, Hui Yu Chen, Chang Yan Hsieh, Po Tsung Tu, Po Chun Yeh, Shyh Shyuan Sheu, Wei Chung Lo, Shih Chieh Chang, Chang Hong Shen, Jia Min Shieh, Jen Inn Chyi

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this paper, we report the effect of 90-nm-gate InAlGaN/GaN HEMTs with 40 and 100 nm GaN channel thickness. The HEMTs with 40/100 nm channel layer exhibit an IDS sat of 839/931 mA/mm, and gm of 271/250 mS/mm, respectively. These results indicate that the thin channel devices have better control on channel conductivity, resulting in a higher peak gm. As for the RF performance, the cut-off frequency (FT) of the devices with 40/100 nm channel thickness is 112.3 GHz/94.2 GHz, respectively.

原文???core.languages.en_GB???
主出版物標題2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9798350360349
DOIs
出版狀態已出版 - 2024
事件2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Hsinchu, Taiwan
持續時間: 22 4月 202425 4月 2024

出版系列

名字2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Proceedings

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???event.eventtypes.event.conference???2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024
國家/地區Taiwan
城市Hsinchu
期間22/04/2425/04/24

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