Effective gap filling via magnetic field simulation assisted on Longthrow sputtering PVD of side magnet designs and arrangements for 3DIC application

  • Tomi T. Li
  • , H. T. Chen
  • , J. S. Yeh
  • , Thomas C.K. Yang
  • , S. W. Yang
  • , H. H. Liu
  • , Leo Chiang

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Engineering