Effect of substrate biasing on the epitaxial growth and structural properties of rf magnetron sputtered germanium buffer layer on silicon

Gui Sheng Zeng, Chi Lung Liu, Sheng Hui Chen

研究成果: 雜誌貢獻期刊論文同行評審

2 引文 斯高帕斯(Scopus)

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Keyphrases

Material Science

Engineering

Physics