Effect of rotationally moving surface on roughness measurement of sputtered Pt film with close-loop correction using adaptive optics

Keyphrases

• Adaptive Optics 100%
• Assist System 20%
• Average Roughness 20%
• Binarization 40%
• Binarized Image 20%
• Closed-loop 100%
• Error Value 20%
• High Rotational Speed 20%
• Image Pattern 40%
• Imaging Aberration 20%
• In Situ 40%
• In Situ Measurements 20%
• Induced Disturbance 20%
• Induced Image 20%
• Inspection Method 20%
• Integrated Technique 20%
• Intensity Distribution 20%
• Laser Beams 20%
• Laser Patterning 20%
• Loop Corrections 100%
• Measurement Results 20%
• Moving Speed 20%
• Moving Surface 100%
• Optical Inspection 20%
• Optical Techniques 20%
• Pt Film 100%
• Pt Thin Film 20%
• Rotational Speed 20%
• Rotational Surface 20%
• Roughness Measurement 100%
• Silicon Surface 20%
• Speckle Pattern 20%
• Speckle Tracking Imaging 20%
• Sputtered Thin Film 20%
• Stylus 20%
• Surface Roughness 40%
• Surface Roughness Measurement 20%
• Trend Equation 20%
• Wafer 20%
• Wafer Surface 20%

Engineering

• Circumferential 33%
• Error Value 33%
• Good Agreement 66%
• Inspection Method 33%
• Laser Beams 33%
• Moving Surface 100%
• Rotating Speed 33%
• Rotating Surface 33%
• Rotational Speed 33%
• Silicon Surface 33%
• Situ Measurement 33%
• Thin Films 66%

Material Science

• Film 100%
• Silicon 16%
• Surface (Surface Science) 100%
• Surface Roughness 50%
• Thin Films 33%