Keyphrases
Moving Surface
100%
Closed-loop
100%
Adaptive Optics
100%
Roughness Measurement
100%
Loop Corrections
100%
Pt Film
100%
In Situ
40%
Surface Roughness
40%
Image Pattern
40%
Binarization
40%
Measurement Results
20%
Rotational Speed
20%
Error Value
20%
Laser Beams
20%
Wafer
20%
Wafer Surface
20%
Silicon Surface
20%
In Situ Measurements
20%
Laser Patterning
20%
Moving Speed
20%
Trend Equation
20%
Rotational Surface
20%
Sputtered Thin Film
20%
Speckle Pattern
20%
Assist System
20%
Imaging Aberration
20%
High Rotational Speed
20%
Intensity Distribution
20%
Induced Image
20%
Induced Disturbance
20%
Stylus
20%
Optical Inspection
20%
Average Roughness
20%
Optical Techniques
20%
Binarized Image
20%
Surface Roughness Measurement
20%
Inspection Method
20%
Speckle Tracking Imaging
20%
Pt Thin Film
20%
Integrated Technique
20%
Engineering
Moving Surface
100%
Thin Films
66%
Good Agreement
66%
Rotational Speed
33%
Error Value
33%
Circumferential
33%
Silicon Surface
33%
Situ Measurement
33%
Rotating Speed
33%
Inspection Method
33%
Rotating Surface
33%
Laser Beams
33%
Material Science
Film
100%
Surface (Surface Science)
100%
Surface Roughness
50%
Thin Films
33%
Silicon
16%